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    반도체용 형광 X-선 분석장치 Wafer/Disk Analyzer 3650
  • Wafer size : up to 8 inch
  • Multi layer film analysis
  • 동시 분석 film thickness and composition
  • Multi point measurement
  • 20원소 동시 측정
  • GEM 대응
  • 반도체용 형광 X-선 분석장치
    Wafer/Disk Analyzer 3650
  • Wafer size : up to 8 inch
  • Multi layer film analysis
  • 동시 분석 film thickness and composition
  • Multi point measurement
  • 20원소 동시 측정
  • GEM 대응
  • Product Features 제품특징

    Wafer/Disk Analyzer 3650

    Wafer size : up to 8 inch
    Multi layer film analysis
    동시 분석 film thickness and composition
    Multi point measurement
    20원소 동시 측정
    GEM 대응

    • 분석 원소: 4Be~92U
    • 200mm까지의 반도체 공정용
    • BPSG, Wsix, 강유전체막(PZT, BST등의 두께 및 조성등의 동시 분석
    • BPSG, SiO2, Si3N4, Doped polySi(B, P, N, As), Wsix, Al-Cu, TiW, TiN, TaN, PZT, BST, SBT, MRAM 등  
    • 금속막: W, Mo, Ti, Co, Ni, Al, Cu, Ir, Pt, Ru 등  
    • 자기 디스크: CoCrTa, CoCrPt, DLC, NiP 등  
    • 광학 자기 디스크: Tb-FeCo 등  
    • 자기 헤드: GMR, TMR 등
    Specifications 제품사양
    Specifications
    Sample sizeMax 8"
    Simultaneous analysis elements Fixed type Max 20 elements
    Scan type Heavy element (22Ti ~ 92U)
    Aperture Selectable 4 kinds out of 5, 10, 15, 20, 40mm diameter
    X-ray tube Rh target, Max 4kW
    Detector S-PC, SC, F-PC (PR gas rquired for F-PC)
    Sample stage XYθ stage
    Analysis spot designation r, θ designation, r : 1mm step, θ : 1˚ step
    Sample spin mechanism 6rpm (available only for wafer center analysis
    availble up to 8" wafer
    C-to-C (option) Orientation flat / V-notch alignment available
    Vacuum pump Dry pump
    Stabilizing system Temperature stabilizer, Automatic vacuum control system
    Data processing system Personal computer, windows 7
    Software
    Film thickness / Concentration simultaneous analysis software
    Fundamental Parameter software for thin film analysis
    Mapping software (option)
    On-line analysis program(option) Complies with GEM
    Safety standard Complies with SEMI S2-0310, CE Marking (option)
    Others SMIF, Through-the-wall, can be met according to a preliminary meeting
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