이온빔 원자층 식각 장비
Infinity Ion Beam Etching Load Lock type
이온빔 스퍼터 장비
Ion Beam Sputtering Cluster Tool
High throughput LL 식각 장비
Planetary Etch System (PSIBE)
Laboratory Alloy And Nanolayer System (LANS)
Laboratory Alloy And Nanolayer System (LANS)
Biased Target 스퍼터 장비
Infinity Biased Target Sputtering System
High Vacuum Evaporator Platform
DV-502B