PRODUCT

  • PRODUCT
  • 전자현미경 악세사리
  • BACK
    NanoX-2000 NanoX-2000
  • Non Contact
  • Fast, Robust
  • Versatile Interferometry Optical Metrology
  • NanoX-2000
    NanoX-2000
  • Non Contact
  • Fast, Robust
  • Versatile Interferometry Optical Metrology
  • Product Features 제품특징

    NanoX-2000

    NanoX-2000 series are non-contact, fast, robust, versatile, and ease of use interferometry 3D optical profiler metrology systems.
    They have world best CoO and wide range measurement applications, MEMS,
    Semiconductor manufacturing, PV cell and LED manufacturing, precision machining, surface roughness, nano surface defects, and many others.

    Specifications 제품사양
    Specifications
    NanoX-2000Measurement Mode : PSI + VSI
    CCD Resolution :1280×960 pixel
    Measurement : FOV 360×480um(10x objective)depending on the objective and CCD camera
    Optical System : Infinity corrected microscopic optics
    Illumination : High efficiency, long life LED
    Focusing’ :100mm range, manual(auto-focusing optional)
    XY Stage : 160mm/200mm manual stage with micrometer adjustment
    XY translation : ±25mm,Max load:5kg
    Tip/Tilt adjustment : ±5°manual (Motorized XY stage optional)
    Z Scan Range : 100um PZT stage (400um PZT stage optional,extendable to 10mm scan)
    Vertical Resolution : 0.1nm
    Lateral Resolution : ≥0.48um(50× objective)
    RMS Repeatability : 0.01nm,1σ
    Objective : Nikon interferometry objective, 2.5x, 5x, 10x, 20x, 50x, 100x
    Scan Speed PSI :< 5 s;VSI :Max scan speed 45um/s