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Non Contact
Fast, Robust
Versatile Interferometry Optical Metrology
3D 광학 프로파일러 측정 장비 NanoX-2000
Non Contact
Fast, Robust
Versatile Interferometry Optical Metrology
3D 광학 프로파일러 측정 장비
NanoX-2000
Product Features
제품특징
NanoX-2000
NanoX-2000 series are non-contact, fast, robust, versatile, and ease of use interferometry 3D optical profiler metrology systems.
They have world best CoO and wide range measurement applications, MEMS,
Semiconductor manufacturing, PV cell and LED manufacturing, precision machining, surface roughness, nano surface defects, and many others.
Specifications
제품사양
| Specifications | ||
| NanoX-2000 | Measurement Mode : PSI + VSI | |
| CCD Resolution :1280×960 pixel | ||
| Measurement : FOV 360×480um（10x objective）depending on the objective and CCD camera | ||
| Optical System : Infinity corrected microscopic optics | ||
| Illumination : High efficiency, long life LED | ||
| Focusing’ :100mm range, manual（auto-focusing optional） | ||
| XY Stage : 160mm/200mm manual stage with micrometer adjustment | ||
| XY translation : ±25mm，Max load：5kg | ||
| Tip/Tilt adjustment : ±5°manual (Motorized XY stage optional) | ||
| Z Scan Range : 100um PZT stage (400um PZT stage optional，extendable to 10mm scan) | ||
| Vertical Resolution : 0.1nm | ||
| Lateral Resolution : ≥0.48um（50× objective） | ||
| RMS Repeatability : 0.01nm，1σ | ||
| Objective : Nikon interferometry objective, 2.5x, 5x, 10x, 20x, 50x, 100x | ||
| Scan Speed PSI :＜ 5 s；VSI ：Max scan speed 45um/s | ||
