BSE Detector
BSE detector Upgrade, SDD replacement
Single crystal YAG : Ce sensor(sensor 교체 필요 없음)
최고의 image quality를 구현하는 Scintillator/PMT
High Speed : 20nm/pixel (TV rate speed)
High Sensitivity : 0.5keV 이하의 가속전압 차이 구분
최상의 S/N ratio
High Vacuum + Low Vacuum + ESEM operation
Materials Z contrast 분석
- PRECISE MECHANICS -
Motorized retraction mechanism
Bellows-sealed high vacuum system
Retraction 150 mm
Compact design
Precise alignment
Customized connection to SEM
| Specifications | ||
| Sensor Unit | YAG:Ce scintillator with 75ns decay time and 30photons/keV | |
| Outer diameter 15mm | ||
| Hole diameter 1.2/2/4//6mm | ||
| Sensor thickness 4mm | ||
| CRYTUR low-energy coatingTM sensitive down to 0.5keV | ||
| Mechanical Unit | 145mm retraction path | |
| +/- 2mm adjustment | ||
| 0.01mm repeatibility | ||
| Bellows vacuum sealing | ||
| Electronics Control Unit | 50MHz bandwidth – 20ns/pxl | |
| +/-1V (max+/-5V) video signal output | ||
| Remote SW control or Manual operation | ||