Logger Script

제품 및 솔루션

  • 제품 및 솔루션
  • 반도체 공정/검사 장비
  • BACK
    Laboratory Alloy And Nanolayer System (LANS) Laboratory Alloy And Nanolayer System (LANS)
  • The Laboratory Alloy and Nanolayer System (LANS) is 4Wave’s Flagship R&D system.
  • This system has received wide acceptance in the academic materials research world.
  • Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.
  • Laboratory Alloy And Nanolayer System (LANS)
    Laboratory Alloy And Nanolayer System (LANS)
  • The Laboratory Alloy and Nanolayer System (LANS) is 4Wave’s Flagship R&D system.
  • This system has received wide acceptance in the academic materials research world.
  • Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.
  • Product Features 제품특징

    Laboratory Alloy And Nanolayer System (LANS)

    - Markets Include -
    Optics
    Magnetic sensors
    University Research & Development

    - Applications -
    Materials Research and Development

    Specifications 제품사양
    Specifications
    Laboratory Alloy And Nanolayer System (LANS)High output, low-energy plasma source
    6 x 4″ biased target carousel
    independent target biasing for alloy composition control
    100mm diameter process surface
    <3% non-uniformity over 75 mm
    substrate plasma cleaning, etching oxidation, nitridation
    Water cooled, rotating, magnetic, shuttered stage, heating up to  600 C
    Single wafer load lock stage
    Video 관련영상
    Related 관련제품

    서버에 요청 중입니다. 잠시만 기다려 주십시오...