BACK
The Laboratory Alloy and Nanolayer System (LANS) is 4Wave’s Flagship R&D system.
This system has received wide acceptance in the academic materials research world.
Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.
Laboratory Alloy And Nanolayer System (LANS) Laboratory Alloy And Nanolayer System (LANS)
The Laboratory Alloy and Nanolayer System (LANS) is 4Wave’s Flagship R&D system.
This system has received wide acceptance in the academic materials research world.
Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.
Laboratory Alloy And Nanolayer System (LANS)
Laboratory Alloy And Nanolayer System (LANS)
Product Features
제품특징
Laboratory Alloy And Nanolayer System (LANS)
- Markets Include -
Optics
Magnetic sensors
University Research & Development
- Applications -
Materials Research and Development
Specifications
제품사양
| Specifications | ||
| Laboratory Alloy And Nanolayer System (LANS) | High output, low-energy plasma source | |
| 6 x 4″ biased target carousel | ||
| independent target biasing for alloy composition control | ||
| 100mm diameter process surface | ||
| <3% non-uniformity over 75 mm | ||
| substrate plasma cleaning, etching oxidation, nitridation | ||
| Water cooled, rotating, magnetic, shuttered stage, heating up to 600 C | ||
| Single wafer load lock stage | ||
Video
관련영상
